AVS Journal of Vacuum Science & Technology: jvsta.org | jvstb.org

Joined April 2016
468 Photos and videos
Machine learning has become essential materials & surface analysis, providing insights into composition, structure & function. @latrobe researchers highlight practical computational choices to achieve faster results exploring #ToFSIMS hyperspectral data. doi.org/10.1116/6.0005335
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Don't know the difference between #JVSTA & #JVSTB? Don't worry, you're not alone! Check out the full scope of each journal on our websites. JVST A ➡️ pubs.aip.org/avs/jva/pages/a… JVST B ➡️ pubs.aip.org/avs/jvb/pages/a… We can't wait to see what you submit (and to which journal)!
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Researchers from @UOsaka_en use atomistic simulations to reveal the double-edged role of ions in plasma #ALDep of silicon nitride: they drive film growth & remove chlorine, but can also bury impurities deeper in the material. doi.org/10.1116/6.0005302
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Energy & exposure time of Ar ion bombardment on 2D WSe2 is investigated - researchers from @DukeU discover using the Ar ion beam to modify metal contact interfaces in 2D FETs improves device performance variation at the cost of a reduction in on-current. doi.org/10.1116/6.0005387
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When 2D materials are grown by #MBE, they often have a high density of twin defects. Check out this study from @UWMadison & @usarmy_devcom on growth conditions of van der Waals material GaSe - showing that at low temps, non-twinned films can be formed. doi.org/10.1116/6.0005445
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By tuning surface chemistry & combining area-selective etching with atomic layer processing, polymer templates can directly guide subsequent selective deposition - highlighting a promising bottom-up route for next-gen semiconductor fabrication. doi.org/10.1116/6.0005294
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What if you could turn up the brightness of a chip like a volume knob? A few clever fabrication tweaks transform a thin film into a light-boosting amplifier & a tiny racetrack for photons—bringing sci-fi-level photonics a step closer to reality. doi.org/10.1116/6.0005339
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Diamonds power quantum tech—but only if their surfaces stay perfect. @Princeton researchers flip #ALEtch to gently smooth diamond at the atomic scale, preserving its quantum magic for next-gen sensors and qubits. doi.org/10.1116/6.0005266

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Through a case study in #ALDep & #ALEtch, this article shows that structuring review knowledge as machine-actionable graphs complements language models, improving accuracy, consistency, & reproducibility in scientific querying and analysis. doi.org/10.1116/6.0005226
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GaN is a material of interest for a wide range of applications. @Cornell authors create lateral devices w/o air exposure using patterned MBE & selective area sublimation, a technique that may enable creation of very complicated devices in the future. doi.org/10.1116/6.0005402

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Atomic-scale control at surfaces is where materials performance is won or lost & it’s rarely driven by a single mechanism. @penn_state authors dive into how diffusion, reaction kinetics, & energetic particle interactions collide to shape thin film growth. doi.org/10.1116/6.0005391
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Wafer-scale integration of 2D semiconductors is almost a reality: @FraunhoferIMS & @dresden_ifw show large-area WS₂ films grown by #ALDep & structured directly w/ conventional lithography, w/o sacrificing material quality or continuity across the wafer. doi.org/10.1116/6.0005225
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#JVSTA work from @ODU, @Fermilab, & @JLab_News: co-sputtering high-temp annealing achieves desired Nb₃Sn phase w/ controlled Sn content. Result: better film uniformity across complex geometries, one of the key barriers to consistent superconduction. doi.org/10.1116/6.0005369
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