The ASML book author saw the next generation â Lace Lithography, using helium atoms shooting through a holographic mask to scale beyond whatâs possible with light, where the wavelength is larger than atomic scale.
âASML is the only company capable of using EUVâextreme ultraviolet lightâto print ultra-fine chip patterns at the 2-nanometer level desired by Musk. Last year, ASML produced 48 of these EUV machines. While there are plans to ramp up production, a rapid doubling of output is not in the cardsâASMLâs suppliers simply cannot manage that pace.â
âLace Lithography is developing a lithography machine capable of printing chip circuitry using helium atoms. âWhere light ends, atoms begin,â says Bodil Holst, founder of this start-up based in Bergen, Norway. The wavelength of light determines the precision with which one can 'print.' Think of it like making a tiny drawing: you would much rather use a fine-tipped pen than a blunt carpenter's pencil. EUV employs a wavelength of 13.5 nanometers and further narrows that beam using mirrors. The 'beam' of helium atoms, however, is less than one-tenth of a nanometer wide, allowing it to draw with far greater intricacy.â
âIn a nutshell: Lace propels energized helium atomsâeach carrying an extra electrical chargeâthrough a mask perforated with tiny holes. The atoms that pass through unimpeded strike the photosensitive layer of a silicon wafer, thereby etching the desired pattern. That perforated mask reminded Bodil Holst of *kantklossen* (known in English as 'lace making'), which is why she named her company just that. A test rig is currently operational at the Lace laboratory in Bergenâ
âThe foundation for this âatomic approachâ dates back to the 1990s, but neither the timing nor the technology was ripe for it at the time. This is because extensive computation is required to design the perforated diffractive mask in such a way that the chip's circuitry remains accurate. This can only be achieved with the aid of AI using high-speed chipsâexplains AdriĂ Salvador Palau. âConsequently, without the powerful chips made by EUV machines, we would never have been able to solve this problem.â"
â Translated from the Dutch original:
nrc.nl/nieuws/2026/04/03/kanâŚ
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âŁđâŁđâŁđâŁđ⣠The ASML Way
I just finished this history of the most important semiconductor equipment company in the world, as translated from the Dutch original (and lurking in the background might be a better way).
Reminder: ASML builds 100% of the worldâs extreme ultraviolet (EUV) lithography machines, without which cutting edge chips are simply impossible to make. Itâs the most expensive mass-produced machine tool in history. Oh, and today, there are two special women without whom, all EUV lithography would sputter to a stop (see p.141 below)
ASML was formed in 1984 as a JV with Philips, the Dutch electronics company that contributed ~$15M (in guilders) and 40 engineers, and âit seemed doomed from the start.â (p.35) There were 10 viable competitors at the time, more than enough to serve the market as ASML learned at SEMICON in 1984 (by coincidence, I was also there with my Dad who about to leave Mostek to run Varianâs Semiconductor Equipment Group, but they only had Molecular Beam Epitaxy, a low throughput lithography alternative. My Dadâs attempt to poach a CTO from ASML is on p.72).
âIn these initial years, management worked around the clock to bring in new subsidies. In these initial years, about half of ASMLâs money for research came from The Hague or Brussels.â (48)
ASMLâs âmachines were the first in the industry to utilize modular design. The lens, the wafer-table, the frame for the mask, the light source, the robot that picks the wafers: these are LEGO blocks that, when you bring them together, form a lithography system.â (62)
IPO in 1995. Stock went up 600x in the 30 years that followed. March 2000 market crash: âcancellations from chip manufacturers poured in daily. On paper, the company was bankrupt. Radical cost-cutting measures would be needed.â (82)
Nikon sues: âa rude awakening. ASML had paid far too little attention to its intellectual property in its early years.â (98) âThe best inventors, some of which have more than 200 patents to their name, are commemorated by having their faces engraved on silicon wafers and hung on a series of large wooden beams, like a Mount Rushmore of the chip industry. As of 2023, ASML has registered more than 16,000 patents.â (99)
The machines are insanely sensitive. âAtmospheric pressure fluctuations due to thunderstorms can easily disrupt the lithography process. Or cows. Intel once faced an inexplicable drop in yield every night for a few hours, with researchers running in circles until they finally realized the cause: cow farts. Intel had to pay for three farms to relocate.â (117)
âIn 2006 Intel, who was supplying the chips for Appleâs computers, was asked if it could also supply the processor for the iPhone. It declined.â (122)
âEUV light is extremely difficult to generate and sustain in an industrial environment. The invisible rays are absorbed by almost all materials, even the air, which means the lithography machine needs to have (curved, atomically precise) mirrors instead of lenses and can only operate in a vacuum.â (127)
The Cymer laser / light source has a molten tin âdroplet generator capable of forming a 30-micron droplet of tin at a rate of 50,000 times per second. The laser was rigged to deal two separate blows. First, a gentle tap to flatten the droplet into a pancake-like shape, followed by an intense blast that heated the tin to 200,000 degrees, transforming it into a plasma.â (130)
âDuring its journey through the lithography machine, the light beam comes across 10 mirrors, each absorbing 30% of the light. It starts with 1.5 megawatts from the grid that yields 30 kilowatts in the laser, and that creates 100 watts of EUV light. Of this, about 1 watt ends up on the wafer. But more power also creates more heat. That causes the mirrors to expand, which in turn causes small deviations that immediately need to be corrected with small motors. Even the EUV mask, which carries the blueprint of the chip on it, is itself an extremely sensitive mirror.â (132)
âASML was vastly underestimating the financial consequences of the new technology. In retrospect, this was for the best. No respectable CEO would sign for a project that would take 20 years, without any promise of success or interim profit to carry it through. Thatâs not taking a bet, thatâs bananas. This is also why the Japanese competition dropped out of the race: not because their engineers were any less capable, but because Nikon and Canon were simply not prepared to continue pumping so much money into EUV.â (133)
To finance the purchase of Cymer in 2012, âIntel invested 3.3B Euros into ASML in exchange for 15% of the shares. TSMC was required to purchase 5%... and Samsung acquired a stake at the 11th hour, taking 3%.â (139)
âOnly Joann and one of her colleagues have the ability to wind and solder invisibly small wires (around the nozzle that shoots the tin droplets). Itâs a delicate task few could ever master. âEven watchmakers canât do this,â says their awestruck boss, âand thereâs no way to automate it.â Itâs not a trivial matter: the nozzle regularly gets clogged during day-to-day use in the chip factory. When that inevitably happens, the only thing to do is to swap it out for a new one. Itâs hard to imagine, but without the fingers of Joann and her colleague, the EUV machines at Samsung and TSMC would grind to a halt.â (141)
In 2013, âmost of the droplet generator was still hand-made by Cymer, and it was virtually impossible to test the part in advance. This made for completely unpredictable yields: in the initial phase of production, half of the droplet generators didnât even work.â (142)
â20% of the South Korean economy now relies on the revenue of one single company. Hence their nickname: this is the republic of Samsung.â (156)
âIntel was being surpassed by their competitors in Asia on every front and would only start using EUV for chips after 2023.â (160)
âThe descriptions that chip manufacturers use for these technological generations or ânodesâ need to be taken with a grain of salt. The physical dimensions of the smallest circuits and connections on the chip are, in practice, 5 to 10 times larger than advertised. A nanometer was once a nanometer, but accuracy has never stopped a good marketing slogan.â (161)
Cousins âLisa Su and Jensen Huang, the leaders of AMD and NVIDIA were both born in Tainan, the city where TSMC now produces their chips.â (164)
âThe culture at TSMC is more hierarchical than ASML, but less militaristic than in South Korea.â (166)
âTSMC now commands 60% of the entire foundry market, making it 4x larger than its closest competitor, Samsung.â (167)
âASMLâs next generation of EUV machines goes by the nickname High NA (the numerical aperture increases from 0.35 to 0.55). These colossal scanners span 14 meters and feature large mirrors up to a meter wide. The optical system by itself consists of 20,000 parts and weighs 12 tons, making it 7x heavier than the optics for the current EUV machine.â (175)
âThe High NA system weighs 150 tons and costs 400M Euros. It takes 7 cargo planes to ship this system to customers.â (225)
âThe production of a complex EUV mask costs more than a half million Euros and takes a huge amount of time to calculate.â (181) They âuse AI to understand the interplay between the light beam, the mask, and the chemical reactions on the wafer.â ASMLâs CTO calls it âvoodoo software.â (183)
China: âEuropean governments fear China is transforming into a totalitarian state, capable of forcing Chinese multinationals to spy for the Communist Party. And that poses significant risk to the 5G cellular infrastructure of the West.â (200)
âIn 2017, Chinese customers ordered 700M Euros worth of lithography machines, a new record. Hundreds of ASMLâs scanners were running in the factories of SMIC, Chinaâs largest foundryâ (201)
âEUV is controlled by the Wassenaar Arrangement, the multilateral export control regime on conventional arms and dual-use goods and technologies.â (203)
âAs far as ASML is concerned, fears about EUV being used for military applications are baloney. Most chips found in weapons are âoff-the-shelfâ chips that can also be found in laptops, washing machines or cars, and are easy to purchase anywhere in the world. But the U.S. sees things differently. They fear the emergence of Chinese AI and cyber weapons. And there is one thing those all need: advanced chips.â (205)
âIn January 2020, the U.S. asked the Netherlands to block EUV exports, and suddenly ASML found itself in the spotlight. The Netherlands ultimately denied ASML a license⌠No EUV machine was going to SMIC.â (208)
In 2023 âASML was exporting far more older DUV machines to China than had been expected. Almost half of ASMLâs revenue was coming from China. As the chip industry was pushing the pause button, China kept on hoarding. The U.S. pressed the Netherlands to slam the brakes before January 2024, and the cabinet duly revoked several approved export licenses for ASML machines destined for China.â (234)
âAs China is growing increasingly isolated, so too is the liklihood of a fully-fledged Chinese competitor emerging in the rearview mirror capable of developing an independent chip production chain.â (236) âASML takes this seriously. Their go-to response: âThe laws of nature are the same anywhere.â What was achieved in Brabant, could be achieved in Beijing.â (335)
âTo qualify for government aid (in Bidenâs Chips Act), companies had to agree not to build advanced chip foundries in China or other âcountries of concern.ââ (239)
âThe chip shortage had been a wakeup call, and the nightmare scenario was front and center on everyoneâs mind: if China blocks Taiwan, weâll be without chips within two weeks.â (242)
âThe estimated percentage of people with autism or ADHD at ASML far outnumbers the average. The highly specialized work, revolving around focusing on complex problems that require prolonged attention to the smallest details, makes it well-suited for some autistic traits. ASMLâs CTO and President Van den Brink makes no secret about being dyslexic and actively advocates for targeting this neurodiverse group. They are precisely the analytical and creative thinkers ASML needs, but also often the ones who find it difficult to put themselves in other peopleâs shoes.â (287)
Sounds like teen spirit⌠of Steve Jobs: âVan den Brinkâs power of persuasion lies in his childlike enthusiasm. It works like some kind of reality distortion field. Martin can disrupt your perspective until youâre convinced that you can make the impossible possible.â (321)
âVan den Brink never really led a big company. He guided it like a startup, as if it were a defiant toddler in the body of a mature multinational.â (329)
The book ends with the poignant handover of the company in 2024 to a new leader, the Frenchman Chistophe Fouquet.