A metal one (M1) layer, first simulated by AlphaEvolve-optimized models and then printed in a single exposure with our X-ray lithography tool at a 12 nm half-pitch, resolution equivalent to the 2 nm node. The M1 layer is the most demanding of an advanced semiconductor device.
ALT Printed P24 M1 (12 nm CD) with measurements from a scanning electron microscope.